High Efficiency and Low Cost LINAC System Design Suitable for High Energy Ion Implanters

نویسندگان

  • Jiong Chen
  • Zhimin Wan
چکیده

A new radio frequency (rf) linear accelerator (LINAC) system with high efficiency has been developed by AIBT. The general designs of such a rf LINAC system are briefly discussed. This system includes a plurality of resonators each including an inductor circuit that is connected to at least two rf electrodes. Detailed designs of a system where two of the adjacent rf electrodes are connected to the same inductor circuit are presented. A prototype LINAC system of one resonator that has an inductor circuit connecting two rf electrodes was constructed and tested. The beam energy gains (11B+ ions) of the prototype system were demonstrated to be 230 keV with input rf power of 2 kW. This result indicates that one can accelerate singly charged ions from 80 keV to 1 MeV with a four resonator LINAC system and 10 kW electric power.

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تاریخ انتشار 2002